Day: September 21, 2023

2 2.0µm (a) (b) (d) (c) (e) (f) 0.5 nm 30 nm Resist Layer 1 Top Face Side Face Substrate Layer 2 Side Face Layer 2 Layer 1 Top Face Resist Substrate 10 1 10 2 10 3 10 4 10 5 10 6 Resistance